Topography description of thin films by optical Fourier Transform

In this work, the main problems concerning the scattering of light by real surfaces and films are presented in view of results obtained with the bidirectional reflection distribution function (BRDF) method and optical profilometry (OP). The BRDF and OP studies, being complementary to the atomic force microscopy (AFM), allow one to get information about surface topography. From the optical data, the surface power spectral density (PSD) functions for absorbing and transparent rough films have been found. Both functions have been evaluated from the Fourier transform (FT) of the surface profiles. The usefulness of BRDF-and OP methods in characterization of real surfaces is demonstrated when analyzing the optical data obtained for metallic TiN-and organic PVK thin films deposited on various substrates.