کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1672604 | 1008936 | 2008 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Reconstruction of lattice structure of ion-implanted near-surface regions of Hg1 â XCdXTe epitaxial layers
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موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
The results of X-ray, SIMS, SEM and AFM studies of near-surface regions of Hg1 â XCdXTe (111) and (110) structures have been presented. These structures were obtained during annealing in the vapour of main components of ISOVPE Hg1 â XCdXTe epitaxial layers with the surface implanted with arsenic ions. Berg-Barrett topography method and two-crystal spectrometry technique were exploited. For calculation of depth dependences of deformations and concentrations of dominating defects in the layer's near-surface regions, the Takagi-Taupin equation and generalized dynamic theory of X-ray scattering were used. From experimental SIMS analysis, the distributions of both impurity and main components of Hg1 â XCdXTe solid solution were determined providing more accurately the deformation profiles in near-surface regions of the structures. SIMS and SEM analyses have given evidence of abrupt gradients of content in the Hg1 â XCdXTe solid solution, due to small changes of thermodynamical equilibrium conditions of high-temperature annealing in the near-surface regions. These are the cause of formation of a graded-gap structure with strains in the crystal lattice. AFM studies have demonstrated that the morphology of Hg1 â XCdXTe structures is subjected to the influence of CdTe substrate orientation.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 516, Issue 22, 30 September 2008, Pages 8106-8111
Journal: Thin Solid Films - Volume 516, Issue 22, 30 September 2008, Pages 8106-8111
نویسندگان
A.P. Vlasov, O.Yu. Bonchyk, S.G. Kiyak, I.M. Fodchuk, R.M. Zaplitnyy, T. Kazemirskiy, A. Barcz, P.S. Zieba, Z. Swiatek, W. Maziarz,