کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1672875 | 1008941 | 2008 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Deposition of HfO2 thin films on ZnS substrates
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله

چکیده انگلیسی
HfO2 thin films with columnar microstructure were deposited directly on ZnS substrates by electron beam evaporation process. SiO2 thin films, deposited by reactive magnetron sputtering, were used as buffer layers, HfO2 thin films of granular microstructure were obtained on SiO2 interlayer by this process. X-ray diffraction patterns demonstrate that the as-deposited HfO2 films are in an amorphous-like state with small amount of crystalline phase while the HfO2 films annealed at 450 °C in O2 for 30 min and in Ar for 150 min underwent a phase transformation from amorphous-like to monoclinic phase. Antireflection effect in certain infrared wave band, such as 3-6 μm, 4-12 μm, 4-8 μm and 3-10 μm, can be observed, which was dependent on the thickness of thin films. The cross-sectional images of HfO2 films, obtained by field emission scanning electron microscopy, revealed that there was no distinct morphological change upon annealing.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 516, Issue 15, 2 June 2008, Pages 4695-4699
Journal: Thin Solid Films - Volume 516, Issue 15, 2 June 2008, Pages 4695-4699
نویسندگان
Qi He, Hui-bin Guo, Jun-jun Wei, S.J Askari, Hong-bin Wang, Shu-yu Zhang, Hai Yang, Xiao-ping Su, Fan-xiu Lu,