کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1672875 1008941 2008 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Deposition of HfO2 thin films on ZnS substrates
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
Deposition of HfO2 thin films on ZnS substrates
چکیده انگلیسی
HfO2 thin films with columnar microstructure were deposited directly on ZnS substrates by electron beam evaporation process. SiO2 thin films, deposited by reactive magnetron sputtering, were used as buffer layers, HfO2 thin films of granular microstructure were obtained on SiO2 interlayer by this process. X-ray diffraction patterns demonstrate that the as-deposited HfO2 films are in an amorphous-like state with small amount of crystalline phase while the HfO2 films annealed at 450 °C in O2 for 30 min and in Ar for 150 min underwent a phase transformation from amorphous-like to monoclinic phase. Antireflection effect in certain infrared wave band, such as 3-6 μm, 4-12 μm, 4-8 μm and 3-10 μm, can be observed, which was dependent on the thickness of thin films. The cross-sectional images of HfO2 films, obtained by field emission scanning electron microscopy, revealed that there was no distinct morphological change upon annealing.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 516, Issue 15, 2 June 2008, Pages 4695-4699
نویسندگان
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