Microstructure and mechanical properties of TiZrAlN nanocomposite thin films by CFUBMS

Quaternary TiZrAlN nanocomposite thin films were deposited by Closed-Field Unbalanced Magnetron Sputtering (CFUBMS), and their microstructure and mechanical properties were examined. The grain refinement of the TiZrAlN nanocomposite thin films was controlled by adjusting the N2 partial pressure. The hardness of the film varied with the N2 partial pressure with a maximum value of approximately 47 GPa. A critical grain size, dc, was found to be essential for maximizing the hardness.