Effect of TiOx seed layer on the texture and electric properties in La and Ca modified PbTiO3 thin films

Lanthanum-and calcium-modified PbTiO3 (PLCT) ferroelectric thin films were successfully prepared on Pt(111)/Ti/SiO2/Si substrates by pulsed laser deposition. Influence of TiOx seed layer on texture and electric properties of PLCT films was investigated. It is found the PLCT films without seed layer exhibited highly (100)-textured, while using about 9 nm TiOx as seed layer lead to highly (301)-textured. The PLCT film with TiOx seed layer possess higher remnant polarization (Pr = 26 µC/cm2), better pyroelectric coefficient and figure of merit at room temperature (p = 370 µC/m2k, Fd = 190 × 10− 5 Pa− 1/2) than that of film without seed layer. The mechanism of the enhanced electric properties was also discussed.