کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1673442 | 1008948 | 2008 | 8 صفحه PDF | دانلود رایگان |
The investigations of plasma parameters and active particles kinetics in Cl2 and HCl direct current glow discharges (p = 40–300 Pa, jd = 8.5 × 10− 3 A/cm2) were carried out. The investigation combined plasma diagnostics by Langmuir probes, absorption spectroscopy and self-consistent 0-dimensional plasma modeling based on the solution of Boltzmann kinetic equation. It was found that the model provides an outstanding agreement with experiment on the reduced electric field strength (E/N), Cl atom density and the total flux of positive ions and thus, gives an adequate description of basic kinetic effects determining the steady-state plasma parameters and composition. Under the same operating conditions, Cl2 plasma provides higher E/N, mean electron energy, dissociation degree and electronegativity that can be explained by the peculiarities of formation-decay kinetics analyzed in both systems.
Journal: Thin Solid Films - Volume 516, Issue 10, 31 March 2008, Pages 3020–3027