Characterization of diamond-like carbon coatings prepared by pulsed bias cathodic vacuum arc deposition

Hydrogen free diamond-like carbon (DLC) coatings have been deposited on Si(100) and stainless steel substrates by cathodic vacuum arc plasma deposition with pulse voltage. Adherent deposits on silicon can be obtained through applying gradient Ti/TiC/DLC layers. A pulse bias of − 100 V was applied to the substrate in order to obtain a denser structure of DLC coating approximately 1 μm thick. The microstructure and hardness value of DLC films were analyzed by using X-ray photoelectron spectroscopy and nano-indenter. The experimental results show that the duty cycle strongly influenced the hardness and sp3 content of the DLC coatings. We observed that when the duty cycle was raised from 2.5% to 12.5%, the hardness increased from 26 GPa to 49 GPa, and the sp3 fraction of the DLC films measured by XPS increased from 39% to 50.8 % as well. But at constant duty cycle, say 12.5%, the hardness is dropped from 49 to 14 GPa in proportion to the increase of residual gas pressure from 3 × 10− 3 Pa to 1 Pa. As the residual gas pressure increased, collisional phenomenon will decrease the energy of the ions. Ions with low energy make more graphitic carbon links and result in a low hardness value.