کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1673617 | 1518085 | 2007 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Oxygen-adsorption characterization of activated non-evaporable Ti–Zr–V getter films by synchrotron radiation photoemission spectroscopy
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
TiZrV films, grown at the deposition angles of 0° and 70°, were used for the study of the oxygen-adsorption process. When the deposition angle is 0°, the appearance of the film is dense columnar structure. However, the film grown at the glancing angle of 70° is composed of porous and isolated columns, which are made of fine clusters. The activated TiZrV films have the capability to absorb oxygen at room temperature. The component Zr is more easily oxidized than Ti and V components when the TiZrV film is exposed in oxygen. The content of oxidized Ti and oxidized V does not linearly increase with the increase of oxygen exposure when there is a metallic Zr component on the surface of the film.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 516, Issues 2–4, 3 December 2007, Pages 378–382
Journal: Thin Solid Films - Volume 516, Issues 2–4, 3 December 2007, Pages 378–382
نویسندگان
Chien-Cheng Li, Jow-Lay Huang, Ran-Jin Lin, Ding-Fwu Lii, Chia-Hao Chen,