Real time determination of film thickness homogeneity profiles of single silver layer products produced on an industrial magnetron line

Homogeneity profiles of the constituent films of a single silver layer product were determined using transmission and reflection measurements across the width of the substrate. Measurements were made with a traveling measurement system common to many industrial magnetron lines. The technique, based on Fresnel relations, and using pre-determined dispersion functions for the film materials, provided good correlation between homogeneity profiles using real time online measurements and profiles determined from spectrophotometric laboratory measurements.