کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1673677 | 1518098 | 2006 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Modern techniques for surface and thin film analysis
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موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
Development and production of thin films for functional coatings on special materials is unalterable combined with a permanent quality control and therefore use of sophisticated analysis and measurement techniques. The field of interest is belonging to all steps of the production chain, starting with the characterization of the substrate surface, followed by polishing and cleaning processes up to depth profiling of complex multilayers. The typical analyses are focused to topographical and chemical features and their influence onto the product functionality. The advantage of surface and thin film analysis for problem-oriented characterization is demonstrated by a few selected examples.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 502, Issues 1â2, 28 April 2006, Pages 170-174
Journal: Thin Solid Films - Volume 502, Issues 1â2, 28 April 2006, Pages 170-174
نویسندگان
V. Rupertus,