کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1674582 | 1008966 | 2008 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Structural, electrical and optical properties of sputter-deposited Nb-doped TiO2 (TNO) polycrystalline films
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Structural, electrical and optical properties of sputter-deposited Nb-doped TiO2 (TNO) polycrystalline films Structural, electrical and optical properties of sputter-deposited Nb-doped TiO2 (TNO) polycrystalline films](/preview/png/1674582.png)
چکیده انگلیسی
Transparent conductive oxide (TCO) films of polycrystalline Nb-doped TiO2 (TNO) were fabricated by post-annealing reactively sputtered amorphous films under H2 atmosphere. Carrier transport properties of the H2-annealed films were found to be strongly dependent on substrate temperature Ts and oxygen content in sputtering atmosphere. A minimum resistivity (ρ) of 9.5 × 10− 4 Ω cm and an average visible transmittance of ∼ 75% were obtained at Ts = RT and oxygen content of 10%. This ρ value is of the same order as those of epitaxial TNO films, indicating that polycrystalline TNO has sufficient potential as a practical TCO suitable for large-area applications.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 516, Issue 17, 1 July 2008, Pages 5754–5757
Journal: Thin Solid Films - Volume 516, Issue 17, 1 July 2008, Pages 5754–5757
نویسندگان
Naoomi Yamada, Taro Hitosugi, Ngoc Lam Huong Hoang, Yutaka Furubayashi, Yasushi Hirose, Seiji Konuma, Toshihiro Shimada, Tetsuya Hasegawa,