کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1674837 | 1518118 | 2005 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Effects of bias voltage on the properties of ITO films prepared on polymer substrates
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Effects of bias voltage on the properties of ITO films prepared on polymer substrates Effects of bias voltage on the properties of ITO films prepared on polymer substrates](/preview/png/1674837.png)
چکیده انگلیسی
The ITO (indium tin oxide) thin films were deposited on acryl, glass, PET, and poly-carbonate substrates by DC reactive magnetron sputtering. The bias voltage was changed from −20 to −80 V. As the bias voltage increased, the deposition rate of ITO films decreased regardless of substrate types. The roughness of the films on PET increased with the bias voltage. The study demonstrated that the bias improved the electrical and optical properties of ITO films regardless of substrate types. The lowest electrical resistivity of 5.5×10−4 Ω-cm and visible transmittance of about 80% were achieved by applying a negative bias of −60 V.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volumes 480–481, 1 June 2005, Pages 157–161
Journal: Thin Solid Films - Volumes 480–481, 1 June 2005, Pages 157–161
نویسندگان
Jaehyeong Lee, Hakkee Jung, Donggun Lim, Keajoon Yang, Woochang Song, Junsin Yi,