Effects of oxygen concentration on the properties of sputtered SnO2:Sb films deposited at low temperature

Antimony doped tin oxide (SnO2:Sb) films have been prepared by d.c. magnetron sputtering and the properties of the films depend on deposition conditions, such as O2 gas ratio, were investigated. The gas composition was found to affect the properties of the films. With the incorporation additional oxygen, the electrical and optical properties of films significantly improved. The minimum value of resistivity of the films was 4.9 × 10− 3 Ω cm at the oxygen concentration of 30% and the optical transmittance was over 80%.