کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1675369 | 1518096 | 2006 | 4 صفحه PDF | دانلود رایگان |
![عکس صفحه اول مقاله: Comparative investigation of TaN and SiCN barrier layer for Cu/ultra low k integration Comparative investigation of TaN and SiCN barrier layer for Cu/ultra low k integration](/preview/png/1675369.png)
This paper reports comparative studies of TaN and SiCN as barrier for Cu-porous dielectric (k < 2.3) integration using various techniques. It was found that SiCN dielectric is much better than TaN for the Cu-Ultra low k (ULK) integration. Upon thermal annealing at 400 °C for different periods of time, TEM images revealed strong intermixing at the two interfaces of Cu/TaN/ULK structures but no sign of diffusion in Cu/SiCN/ULK structure even after being annealed at 400 °C for 150 min. The strong intermixing in the Cu/TaN/ULK structure results from grain boundaries in the TaN film and porosity of the dielectric, while the excellent reliability of the Cu/SiCN/ULK dielectric is ascribed to the amorphous structure and high thermal stability of the SiCN film.
Journal: Thin Solid Films - Volume 504, Issues 1–2, 10 May 2006, Pages 265–268