کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1675560 1008980 2007 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Tuning of electrical and structural properties of indium oxide films grown by metal organic chemical vapor deposition
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
Tuning of electrical and structural properties of indium oxide films grown by metal organic chemical vapor deposition
چکیده انگلیسی

Tuning of structural and electrical properties of indium oxide (In2O3) films by means of metal organic chemical vapor deposition is demonstrated. Phase selective growth of rhombohedral In2O3(0001) and body-centered cubic In2O3(001) polytypes on (0001) sapphire substrates was obtained by adjusting the substrate temperature and trimethylindium flow rate. The specific resistance of the as-grown films can be tuned by about two orders of magnitude by varying the growth conditions.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 515, Issue 16, 4 June 2007, Pages 6611–6614
نویسندگان
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