Characterization of TiCr(C,N)/amorphous carbon coatings synthesized by a cathodic arc deposition process

Ternary TiCrN and nanocomposite TiCr(C,N)/amorphous carbon (a-C) coatings with different carbon contents (0–26.6 at.%) were synthesized by cathodic arc evaporation with plasma enhanced duct equipment. The structural, chemical, and mechanical properties of the deposited films were studied by X-ray diffraction, X-ray photoelectron spectroscopy (XPS), and nanoindentation measurement. The atomic content ratios of carbon/(Ti + Cr) and carbon/nitrogen increased with increasing C2H2 flow rate. A nanocomposite structure of coexisting metastable hard TiCr(C,N) crystallites and amorphous carbon phases was found in the TiCr(C,N)/a-C coatings, those possessed smaller crystallite sizes than the ternary TiCrN film. XPS analyses revealed the concentration of a-C increased with increasing carbon content from 8.9 at.% to 26.6 at.%. Exceeding the metastable solubility range of carbon within the TiCrN lattice, the carbon formed a-C phase in the deposited coatings. The nanocomposite TiCr(C,N)/a-C coatings exhibited higher hardness value of 29–31 GPa than the deposited TiCrN coating (26 ± 1 GPa). It has been found that the structural and mechanical properties of the films were correlated with the carbon content in the TiCr(C,N)/a-C coatings.