کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1676812 1518104 2006 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Investigation of properties of thin oxide films SnOx annealed in various atmospheres
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
Investigation of properties of thin oxide films SnOx annealed in various atmospheres
چکیده انگلیسی

The influence of annealing in various atmospheres on properties of the undoped SnOx thin films has been studied. The films with thickness of ∼400 nm have been deposited on glass substrate by a method of magnetron sputtering in argon–oxygen atmosphere at the pressure inside the chamber 0.9 and 2.7 Pa. The dependences of structural and optical properties of SnOx films from temperature of annealing in air, vacuum and atmosphere hydrogen have been investigated. Correlations between the structural and optical properties of tin oxide films were found.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 495, Issues 1–2, 20 January 2006, Pages 316–320
نویسندگان
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