کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1677037 1518094 2006 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Characteristics of a micro-plasma produced by atmospheric pressure RF impulse discharge using coaxial micro-electrode
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
Characteristics of a micro-plasma produced by atmospheric pressure RF impulse discharge using coaxial micro-electrode
چکیده انگلیسی
In order to achieve inner wall surface treatment of glass tube of micrometer and gas decomposition flowing through a small diameter glass tube, a micro-plasma is useful. We have developed a new method for producing a micro-plasma in order to apply to the surface treatment and micro-plasma CVD on the inner wall surface of a micro-glass tube at atmospheric pressure. The plasma is produced by using a coaxial micro-electrode to which RF impulse is applied. We have elucidated fundamental characteristics of the discharge and optimized the electrode configuration. We find that breakdown voltage can be decreased with a decrease in the diameter of the inner electrode. We also clarified the effect of gas species and flow rate on the discharge.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volumes 506–507, 26 May 2006, Pages 436-439
نویسندگان
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