کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1677210 | 1518105 | 2006 | 4 صفحه PDF | دانلود رایگان |
We have investigated the influence of N2 addition to the Ar sputtering gas on the crystal orientation of sputtered Ru films. An rf magnetron sputtering apparatus with a Ru target (99.9%) and a glass substrate heated to 100 °C or 300 °C was used for the deposition. The crystal structure, chemical composition and electrical properties of the resultant films were investigated. X-ray diffraction (XRD) revealed the dominant orientation at 0% N2 to be the c-axis. With increasing proportion of N2 in the sputtering gas at a substrate temperature of 100 °C, the intensity of the (002) peak decreased, finally disappearing at 50% N2. This c-axis-suppressed Ru film sputtered at 50% N2 was found to contain nitrogen by Auger electron spectroscopy (AES), but by annealing the film in vacuum at 400 °C, the nitrogen in the film was completely removed. The film orientation remained the same as before annealing. Thus, we have demonstrated a new method for depositing Ru films with a controlled preferential orientation of either c-axis oriented or c-axis suppressed.
Journal: Thin Solid Films - Volume 494, Issues 1–2, 3 January 2006, Pages 240–243