کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1677224 | 1518105 | 2006 | 5 صفحه PDF | دانلود رایگان |
![عکس صفحه اول مقاله: Effect of inter-level dielectrics on electromigration in damascene copper interconnect Effect of inter-level dielectrics on electromigration in damascene copper interconnect](/preview/png/1677224.png)
The impact of dielectric materials on the reliability of advanced copper (Cu) interconnect is of growing importance. The effect of barrier dielectrics and low-k materials of Inter-Level Dielectric (ILD) on the electromigration (EM) in the line and via-line structure of dual-damascene Cu interconnects was analyzed. The resulting electromigration behavior can then be attributed to Cu barrier layer or low-k dielectrics, depending on the test structure. The SiN barrier layer showed a better electromigration endurance compared to SiC barrier layer for narrow Cu line structure. We had also observed that the carbon-doped oxide (CDO) low-k samples had a higher drift velocity, which results in less electromigration endurance on the via-line structure compared to fluorosilicate glass (FSG).
Journal: Thin Solid Films - Volume 494, Issues 1–2, 3 January 2006, Pages 315–319