کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5465727 | 1517970 | 2017 | 7 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Experimental and modeling study on the role of Ar addition to the working gas on the development of intrinsic stress in TiN coatings produced by filtered vacuum-arc plasma
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موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Experimental and modeling study on the role of Ar addition to the working gas on the development of intrinsic stress in TiN coatings produced by filtered vacuum-arc plasma Experimental and modeling study on the role of Ar addition to the working gas on the development of intrinsic stress in TiN coatings produced by filtered vacuum-arc plasma](/preview/png/5465727.png)
چکیده انگلیسی
The aim of this work is to study and model the effect of argon addition to the N2 working gas on the intrinsic stress of TiN coatings deposited via rectilinear filtered vacuum arc plasma using substrate pulse bias potential. It was found that produced TiN coatings have a NaCl type cubic structure with the [110] axial texture regardless of the concentration of argon in the gas mixture. With increasing the content of argon in the gas mixture, the level of residual stress increased from 7Â GPa up to 10Â GPa and the coatings hardness remained at a high level of 27-32Â GPa. By mathematical modeling based on the modified Davis model, it was shown that increasing the stress level in the TiN coatings with increasing of argon content was due to the intensification of the bombardment process of the coating surface by the inert gas ions.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 642, 30 November 2017, Pages 207-213
Journal: Thin Solid Films - Volume 642, 30 November 2017, Pages 207-213
نویسندگان
V.V. Vasyliev, A.I. Kalinichenko, E.N. Reshetnyak, G. Taghavi Pourian Azar, M. Ãrgen, V.E. Strel'nitskij,