کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5465873 | 1517974 | 2017 | 18 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Simple and efficient synthesis of high-quality VO2 thin films and their application in vacuum sensor with wide pressure range
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
High-quality VO2 films have been successfully synthesized on SiO2/Si substrates by a simple and efficient method in a tube furnace. The as-synthesized VO2 films were structurally uniform and single-crystalline. These films show a large resistance change of more than four orders of magnitude with a 5Â K width of the hysteresis loop as the temperature is cycled through the phase transition. VO2 thin-film devices have been fabricated by reactive ion etching (RIE) and deposition processes. The current response of devices under light illumination and bias exhibited a higher sensitivity and a much wider pressure range than that without light illumination. Experimental data also revealed that the current response of a VO2 film device shows an approximately linear dependence on the logarithm of air pressure. These high-quality VO2 thin films with excellent properties have potentially promising application in vacuum sensor.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 638, 30 September 2017, Pages 420-425
Journal: Thin Solid Films - Volume 638, 30 September 2017, Pages 420-425
نویسندگان
Yi Bu, Jijun Zou, Yun Liu, Zhifu Zhu, Wenjuan Deng, Xincun Peng, Bin Tang,