کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5466076 | 1517976 | 2017 | 8 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Effect of different thermo-treatment at relatively low temperatures on the properties of indiumâtin-oxide thin films
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Effect of different thermo-treatment at relatively low temperatures on the properties of indiumâtin-oxide thin films Effect of different thermo-treatment at relatively low temperatures on the properties of indiumâtin-oxide thin films](/preview/png/5466076.png)
چکیده انگلیسی
Pulsed DC magnetron sputtering was used to deposit indiumâtin-oxide (ITO) thin films on glass substrates for application in photovoltaic devices as the final window layer. The evolution of crystal phase, morphology, resistivity and transmittance of the ITO films under different thermal annealing procedure (in-situ annealing versus post-annealing) at relatively low temperatures (up to 300 °C) were studied. Fully crystalline ITO films with low sheet resistance of 24 Ω/â¡ and high average transmittance (exclude glass substrate) of 90.10% with a Haacke's figure of merit 1.47 Ã 10â 2 Ωâ1 were obtained by in-situ annealing at 200 °C. In comparison, the minimum temperature observed to fully crystalize the ITO thin films with competitive crystallinity, electrical and optical properties by post-annealing was 250 °C. The corresponding post-annealed 300 nm thick films showed sheet resistance of 49 Ω/â¡ and average transmittance (exclude glass substrate) as high as 91.93% with a Haacke's figure of merit 0.882 Ã 10â 2 Ωâ1. The surface morphology of the as-deposited ITO films remained homogeneous after post-annealing whereas large particles (up to 100 nm) were observed on the surface of the films deposited by in-situ annealing. The results indicated that different thermal treatment procedures at lower temperatures produce significant effect on the electrical, optical and other physical properties of the ITO thin films which are critical for the window layer in photovoltaics.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 636, 31 August 2017, Pages 702-709
Journal: Thin Solid Films - Volume 636, 31 August 2017, Pages 702-709
نویسندگان
Shengli Zhang, Teng Wang, Shuping Lin, Yi Zhang, Tuquabo Tesfamichael, John Bell, Hongxia Wang,