کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5466387 | 1517990 | 2017 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Adhesion behavior of diamond-like carbon films with F and Si co-doping prepared by radio frequency reactive magnetron sputtering
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Adhesion behavior of diamond-like carbon films with F and Si co-doping prepared by radio frequency reactive magnetron sputtering Adhesion behavior of diamond-like carbon films with F and Si co-doping prepared by radio frequency reactive magnetron sputtering](/preview/png/5466387.png)
چکیده انگلیسی
Diamond-like carbon (DLC) films with F and Si co-doping (DLC:F:Si films) were deposited on medical 316 L stainless steel substrates with radio frequency reactive magnetron sputtering by using trifluromethane (CHF3) and argon as source gases and SiC crystal target. The relations between the RF input powers and adhesion behavior of DLC:F:Si films were investigated. Surface morphology and roughness, hardness, sp2/sp3 hybridization ratio, and bonding configuration were characterized subsequently to demonstrate the adhesion evolution by Atomic force microscope (AFM), nanoindenter, Raman spectrometer, Fourier-transform infrared (FTIR) spectrometer and Friction and wear tester. The relative intensity of the CF symmetric stretch vibration (1160 cmâ 1) to CF2 asymmetric stretch vibration (1220 cmâ 1) and HFCC < stretch vibration (1620 cmâ 1) to F2CC < stretch vibration (1710 cmâ 1) as a function of RF input powers were especially demonstrated. The results show that choosing a appropriate RF input power can effectively modulate the structure and adhesion characteristics of DLC:F:Si films. The DLC:F:Si films prepared at about 200 W RF input power have stable bond configuration and exhibit good adherence, hardness and wear resistance.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 622, 31 January 2017, Pages 89-94
Journal: Thin Solid Films - Volume 622, 31 January 2017, Pages 89-94
نویسندگان
Wei Wu, Zhipeng Zhu, Jiawei Min, Jiandong Zhang, Non Qian, Meifu Jiang,