30 nm X-ray focusing correlates oscillatory stress, texture and structural defect gradients across multilayered TiN-SiOx thin film

30 nm X-ray focusing correlates oscillatory stress, texture and structural defect gradients across multilayered TiN-SiOx thin film

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Acta Materialia - Volume 144, 1 February 2018, Pages 862-873

J. Keckes, R. Daniel, J. Todt, J. Zalesak, B. Sartory, S. Braun, J. Gluch, M. Rosenthal, M. Burghammer, C. Mitterer, S. Niese, A. Kubec,