کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
7942787 1513236 2014 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Effect of thickness on the microstructure, surface morphology and optical properties of N-incorporated β-Ga2O3 films
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد مواد الکترونیکی، نوری و مغناطیسی
پیش نمایش صفحه اول مقاله
Effect of thickness on the microstructure, surface morphology and optical properties of N-incorporated β-Ga2O3 films
چکیده انگلیسی
To investigate the effect of thickness on the microstructure, surface morphology and optical properties of N-incorporated β-Ga2O3 films, a series of N-incorporated β-Ga2O3 samples with different thicknesses were prepared by radio frequency (RF) magnetron sputtering method. X-ray diffraction measurements show that the crystallinity quality was improved by increasing the film thickness. Atomic force microscopy results show that the surface exhibits hillock and island morphology under different film thicknesses. The optical transmittance of all samples is more than 80% in the visible range. The UV absorption edge shifts to longer wavelength, and the small change in the optical band gap value is due to the improved crystallinity of the films.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Superlattices and Microstructures - Volume 65, January 2014, Pages 146-151
نویسندگان
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