کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
8034138 | 1518022 | 2015 | 20 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Mechanical and chemical investigation of the interface between tungsten-based metallizations and annealed borophosphosilicate glass
ترجمه فارسی عنوان
بررسی مکانیکی و شیمیایی رابط بین فلزات بر پایه تنگستن و شیشه بوروفسفسفسیلیکات ضد حرارت
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
چکیده انگلیسی
The focus of this study was on the interface between W-based metallizations and an annealed borophosphosilicate glass (BPSG) dielectric. W-based metallizations are often used in semiconductor devices because of their favourable properties as a diffusion barrier. The interface was characterized mechanically and chemically. For the determination of the interface energy release rate the 4-point-bending method was used. The fracture surfaces resulting from the 4-point-bending experiments were examined to determine the failing interface and the topography of the fracture surfaces. Chemical characterizations of intact interfaces were performed using an electron dispersive X-ray approach in a scanning transmission electron microscope to provide information why Ti incorporated in a W-layer improves the adhesion on annealed BPSG significantly compared to a pure W-layer.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 583, 29 May 2015, Pages 170-176
Journal: Thin Solid Films - Volume 583, 29 May 2015, Pages 170-176
نویسندگان
B. Völker, W. Heinz, K. Matoy, R. Roth, J.M. Batke, T. Schöberl, M.J. Cordill, G. Dehm,