Influence of ternary elements (XÂ =Â Si, B, Cr) on TiAlN coating deposited by magnetron sputtering process with single alloying targets

Ternary Ti-Al-based coatings were deposited by magnetron sputtering method with various alloying targets, such as TiAlSi, TiAlB and TiAlCr. The composition of the coating was almost the same with that of the target. Their microstructures and mechanical properties were investigated by X-ray diffractometer, field emission scanning electron microscope, nano-indenter, tribometer and etc. Moreover, effects of 3rd element on the wear and corrosion properties of Ti-Al-N based coatings were studied here. From the results of TiAlN-X coating properties, the sample coated with TiAlN-B showed the highest hardness. Moreover, TiAlN-Cr coatings showed the best friction coefficient in oil condition and best corrosion resistance with the lowest corrosion current density. Therefore, easy method of coating TiAlN with ternary element using single target, was demonstrated as well as its improved structural properties.