Influence of titanium-substrate roughness on Ca-P-O thin films grown by atomic layer deposition

► Atomic layer deposition of Ca-P-O films on abraded Ti substrate ► Surface analysis using Time-Of-Flight Elastic Recoil Detection Analysis ► Dependence of substrate roughness on the Ca/P atomic ratio of thin films ► An increase in Ca/P atomic ratio with decreasing roughness ► Mouse osteoblast showed greater coverage of cells in polished surface.