Fabrication and characteristics of BaTi0.85Sn0.15O3 thin films on tin doped indium oxide/glass substrate

► BaTi0.85Sn0.15O3 thin films with thicknesses of 90-360 nm are deposited. ► All samples have optical transparency with > 75% in the visible light region. ► The thicker film has an interdiffusion between dielectric film and electrode.