Low temperature ordering and high (001) orientation of [Fe/Pt/Cu]18 multilayer films

► Low-temperature ordering and (001) orientation in [Fe/Pt/Cu]18 films were obtained. ► The perpendicular anisotropy deteriorated with increasing Cu volume concentration. ► The grain size increases in the same annealing condition with increasing Cu volume. ► Ordering temperature was lowered due to increasing the atom diffusion constants.