Si-Zr-C-N-based hydrophobic plasma polymer membranes for small gas molecule separation

► A Si-Zr-C-N single source molecular precursor is proposed. ► Plasma enhanced chemical vapor deposition was used to prepare a thin membrane. ► Smooth and uniform layer was obtained on a γ-alumina porous support. ► Membranes presented a good stability up to 350 °C. ► Si-Zr-C-N membranes showed good performances in gas separation.