Controlled synthesis of SiC nanoparticles from surface silicon contamination

► The surface density of SiC nanodots can be controlled by the surface contamination. ► The shape of the SiC nanodots can be defined by Si crystalline orientations. ► The orientation of the SiC nanodots can be defined by Si crystalline orientation. ► The Si contamination can be controlled by scanning electron microscopy irradiation.