Structure zone model for extreme shadowing conditions

► Microstructures of glancing angle deposited (GLAD) layers are categorized. ► The microstructure changes qualitatively with increasing homologous temperature. ► Of key importance is the competition between surface diffusion and atomic shadowing. ► GLAD yields a direct transition from Zone I to Zone III of the structure zone model. ► Transitions from rods to columns to protrusions to equiaxed grains with whiskers