Chemical structure and morphology of thin bilayer and composite organosilicon and fluorocarbon microwave plasma polymer films

The plasma polymer deposited from a gas mixture of heptadecafluoro-1-decen fluorocarbon and hexamethyldisilane consists of rough cauliflower, polysiloxane-like structures embedded in a smooth fluorocarbon matrix. Moreover, co-polymeric species which are likely to exist at the interface between the two phases in the film were observed. The bilayer system that consisted of a rough interfacial organosilane film coated with a smooth fluorocarbon layer, showed the lowest apparent surface energy and a high water contact angle as the result of both high surface roughness and a high concentration of surface CF2 groups.