کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
9812056 1518106 2005 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Effect of bottom electrodes on the dielectric properties of barium strontium titanate thin films
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
Effect of bottom electrodes on the dielectric properties of barium strontium titanate thin films
چکیده انگلیسی
Barium strontium titanate (Ba0.5Sr0.5TiO3, BST) thin films were prepared on Pt/Ti/SiO2/Si and Pt/Cr/SiO2/Si substrates by sol-gel method. The effects of Pt/Ti and Pt/Cr bottom electrodes on the microstructure and dielectric properties of BST thin films were studied. The X-ray diffraction patterns show that both these films crystallize into a perovskite structure. The atomic force micrographs indicate that the films using Pt/Ti and Pt/Cr as bottom electrodes have different grain distributions and grain sizes. The dielectric constant of the films using Pt/Cr as bottom electrodes decreases significantly and the loss tangent and tunability decrease slightly. However, the figure of merit of the films using Pt/Cr as bottom electrodes still increases from 24.3 to 27.6.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 493, Issues 1–2, 22 December 2005, Pages 20-23
نویسندگان
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