کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9812056 | 1518106 | 2005 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Effect of bottom electrodes on the dielectric properties of barium strontium titanate thin films
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله

چکیده انگلیسی
Barium strontium titanate (Ba0.5Sr0.5TiO3, BST) thin films were prepared on Pt/Ti/SiO2/Si and Pt/Cr/SiO2/Si substrates by sol-gel method. The effects of Pt/Ti and Pt/Cr bottom electrodes on the microstructure and dielectric properties of BST thin films were studied. The X-ray diffraction patterns show that both these films crystallize into a perovskite structure. The atomic force micrographs indicate that the films using Pt/Ti and Pt/Cr as bottom electrodes have different grain distributions and grain sizes. The dielectric constant of the films using Pt/Cr as bottom electrodes decreases significantly and the loss tangent and tunability decrease slightly. However, the figure of merit of the films using Pt/Cr as bottom electrodes still increases from 24.3 to 27.6.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 493, Issues 1â2, 22 December 2005, Pages 20-23
Journal: Thin Solid Films - Volume 493, Issues 1â2, 22 December 2005, Pages 20-23
نویسندگان
Huichun Yu, Min Li, Chun Hui, Ailan Xu, Wenwen Shao,