کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
9812176 1518108 2005 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Plasma and impedance characteristics of internal linear antennas for flat panel display applications
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
Plasma and impedance characteristics of internal linear antennas for flat panel display applications
چکیده انگلیسی
The trend towards large area substrates motivated by flat panel display industries has accelerated the development of the large size plasma sources. In this study, two types of linear internal-type inductively coupled plasma source enabling the production of large area high density plasma, that is, a serpentine-type and a double comb-type were investigated and their characteristics of plasma and impedance were compared. The use of the double comb-type antenna showed higher root-mean-square current, higher plasma density, and lower antenna resistance compared to that of the serpentine-type antenna as the rf power increased from 600 to 5000 W. By the application of 5000 W of rf power with 2 Pa Ar, a high plasma density of 2.2 × 1011/cm3 with the plasma uniformity of 8% for the size of 880 × 680 mm could be obtained for the double comb-type antenna. The improved characteristics of the double comb-type antenna compared with the serpentine-type antenna appear to be from the higher inductive coupling and less standing wave effect compared to the serpentine-type antenna.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 491, Issues 1–2, 22 November 2005, Pages 82-85
نویسندگان
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