کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9812270 | 1518110 | 2005 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Stress-impedance effects in multilayered FeSiB/Cu/FeSiB films
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
Multilayered FeSiB/Cu/FeSiB films with a meander structure were fabricated by magnetron sputtering on thin glass substrate, and the stress-impedance (SI) effects in the multilayered FeSiB/Cu/FeSiB films were studied in the frequency range of 1-40 MHz for different film thicknesses of FeSiB film and Cu layer. Experimental results showed that the values of SI ratio increased with the deflection of the layered FeSiB/Cu/FeSiB films at high frequencies, and a large negative SI ratio of â 17.3% for a frequency of 5 MHz at the deflection of 1 mm was obtained in the multilayered FeSiB/Cu/FeSiB films with a thicker FeSiB film, which was very attractive for the applications of stress sensors.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 489, Issues 1â2, 1 October 2005, Pages 177-180
Journal: Thin Solid Films - Volume 489, Issues 1â2, 1 October 2005, Pages 177-180
نویسندگان
Yong Zhou, Wen Ding, Xin-Hui Mao, Ji-An Chen, Ya-Min Zhang, Xiao-Yu Gao,