کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9812327 | 1518111 | 2005 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Evaluation of commercial ultra-thin Si-on-insulator wafers using laser confocal inspection system
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
Commercially available ultra-thin (50 nm) Si-on-insulator (SOI) wafers were evaluated using a laser confocal inspection system. The defect distribution and defects were observed for both bonded SOI and separation-by-implanted-oxygen (SIMOX) wafers. Some of defects were marked using the system's marking function and evaluated using transmission electron microscopy after the samples were prepared using focused ion beam thinning. The most serious defects observed in both types of wafers were voids. Small defects such as dislocations were also detected. The inspection system is non-destructive and therefore promising for use in pre- and in-line monitoring systems.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 488, Issues 1â2, 22 September 2005, Pages 189-193
Journal: Thin Solid Films - Volume 488, Issues 1â2, 22 September 2005, Pages 189-193
نویسندگان
Atsushi Ogura, Osamu Okabayashi,