کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9812481 | 1518114 | 2005 | 7 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Effect of millimeter-wave annealing on (Ba,Sr)TiO3 films prepared by chemical solution deposition
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Effect of millimeter-wave annealing on (Ba,Sr)TiO3 films prepared by chemical solution deposition Effect of millimeter-wave annealing on (Ba,Sr)TiO3 films prepared by chemical solution deposition](/preview/png/9812481.png)
چکیده انگلیسی
(Ba,Sr)TiO3 (BST) films were deposited on Pt/Ti/SiO2/Si substrates by the chemical solution deposition and annealed by 24 GHz millimeter-wave (mm-wave) radiation as well as electric furnace heating. It was found that BST amorphous films were crystallized by mm-wave annealing at a lower temperature than by electric furnace heating. Films annealed at 973 K for 60 min by the mm-wave had a larger grain size and fewer pores, showing a higher dielectric constant of 270 and a lower leakage current density below 2 Ã 10â 2 A/m2 up to ± 3 V. Films annealed for 1 min exhibited dielectric constant and leakage current similar to those annealed for 60 min, and atomic diffusion between the film and the electrode was barely observed.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 485, Issues 1â2, 1 August 2005, Pages 101-107
Journal: Thin Solid Films - Volume 485, Issues 1â2, 1 August 2005, Pages 101-107
نویسندگان
T. Matsumoto, H. Saito, K. Numata, S. Miyake,