کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9812517 | 1518115 | 2005 | 8 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Transparent conducting oxide thin films of Cd2SnO4 prepared by RF magnetron co-sputtering of the constituent binary oxides
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله

چکیده انگلیسی
Thin films of cadmium tin oxide (Cd2SnO4) have been deposited on glass substrates by RF magnetron co-sputtering from cadmium oxide (CdO) and tin oxide (SnO2) targets in an Argon ambient. Co-sputtering offers a means to control the atomic stoichiometry of Cd2SnO4, which influences the material's electro-optical and structural properties. The Cd2SnO4 films were deposited at room temperature and subsequently subjected to a heat treatment in inert or reducing (H2) ambient. The as-deposited films were amorphous, and became polycrystalline after annealing at high temperatures. Using this method, Cd2SnO4 films with a Hall mobility of 32.3 cm2 Vâ1 sâ1 and a carrier concentration of 7.40Ã1020 cmâ3 corresponding to a resistivity of 2.07Ã10â4 Ω cm have been prepared. The films exhibited average optical total transmission in excess of 90% in the visible region. The optical bandgap was found to be in the range of 2.97-3.18 eV, depending on post deposition treatment.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 484, Issues 1â2, 22 July 2005, Pages 26-33
Journal: Thin Solid Films - Volume 484, Issues 1â2, 22 July 2005, Pages 26-33
نویسندگان
Robert Jr., Don L. Morel, Christos S. Ferekides,