کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9812517 | 1518115 | 2005 | 8 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Transparent conducting oxide thin films of Cd2SnO4 prepared by RF magnetron co-sputtering of the constituent binary oxides
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Transparent conducting oxide thin films of Cd2SnO4 prepared by RF magnetron co-sputtering of the constituent binary oxides Transparent conducting oxide thin films of Cd2SnO4 prepared by RF magnetron co-sputtering of the constituent binary oxides](/preview/png/9812517.png)
چکیده انگلیسی
Thin films of cadmium tin oxide (Cd2SnO4) have been deposited on glass substrates by RF magnetron co-sputtering from cadmium oxide (CdO) and tin oxide (SnO2) targets in an Argon ambient. Co-sputtering offers a means to control the atomic stoichiometry of Cd2SnO4, which influences the material's electro-optical and structural properties. The Cd2SnO4 films were deposited at room temperature and subsequently subjected to a heat treatment in inert or reducing (H2) ambient. The as-deposited films were amorphous, and became polycrystalline after annealing at high temperatures. Using this method, Cd2SnO4 films with a Hall mobility of 32.3 cm2 Vâ1 sâ1 and a carrier concentration of 7.40Ã1020 cmâ3 corresponding to a resistivity of 2.07Ã10â4 Ω cm have been prepared. The films exhibited average optical total transmission in excess of 90% in the visible region. The optical bandgap was found to be in the range of 2.97-3.18 eV, depending on post deposition treatment.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 484, Issues 1â2, 22 July 2005, Pages 26-33
Journal: Thin Solid Films - Volume 484, Issues 1â2, 22 July 2005, Pages 26-33
نویسندگان
Robert Jr., Don L. Morel, Christos S. Ferekides,