کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9812651 | 1518116 | 2005 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Direct observation of thermal alteration of mixed film of Ge and SiO
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
The dynamic behavior of a film produced by coevaporation of Ge-SiO was observed in situ using a transmission electron microscope. The film produced had an amorphous structure containing Si, Ge and SiO2. A characteristic change of the film was observed above 500 °C. Upon heating at 750 °C, in addition to the growth of the SiGe mixed crystal with the diamond structure, the liquidlike mixed phase of SiGe-SiO2 was also produced. The growth process of the liquidlike phase was directly observed in situ. The growth process of Ge and GeSi nanocrystallites has been elucidated by cooling the mixed film to room temperature.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 483, Issues 1â2, 1 July 2005, Pages 396-399
Journal: Thin Solid Films - Volume 483, Issues 1â2, 1 July 2005, Pages 396-399
نویسندگان
C. Kaito, K. Kamitsuji, S. Tanaka, O. Kido, M. Kurumada, T. Sato, Y. Kimura, H. Suzuki, Y. Saito,