کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
9812665 1518117 2005 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Microstructure and electronic investigations of carbon nitride films deposited by RF magnetron sputtering
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
Microstructure and electronic investigations of carbon nitride films deposited by RF magnetron sputtering
چکیده انگلیسی
The analysis of the relationship between the local microstructure evolution versus nitrogen content and electrical properties of amorphous carbon nitride films (a-CNx) deposited by radio frequency (RF) magnetron sputtering is reported. Combined TRIM code, XPS measurements and Raman scattering spectroscopy are used to investigate the microstructure of a-CNx, films, in their as-deposited state, in terms of surface processes, nitrogen incorporation within the films and the Csp2 content. These experiments were completed by dark electrical conductivity measurements performed at room temperature in coplanar configuration. A good correlation is observed between the local microstructure and the conductivity at different amounts of nitrogen.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 482, Issues 1–2, 22 June 2005, Pages 41-44
نویسندگان
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