Electrical and optical properties of Zr1−xAlxN thin films

Zr1−xAlxN thin films, with 0≤x≤0.73, have been synthesized by magnetron sputtering. The phases and the electrical and optical properties have been investigated. For x≤0.43, the Zr1−xAlxN films crystallize in cubic NaCl type of structure (B1 type), while at higher Al content, 0.43