کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9812893 | 1518122 | 2005 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Spatially resolved optical emission spectroscopy of pulse magnetron sputtering discharge
دانلود مقاله + سفارش ترجمه
دانلود مقاله ISI انگلیسی
رایگان برای ایرانیان
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Spatially resolved optical emission spectroscopy of pulse magnetron sputtering discharge Spatially resolved optical emission spectroscopy of pulse magnetron sputtering discharge](/preview/png/9812893.png)
چکیده انگلیسی
The spatially resolved optical emission spectroscopy of various species of a pulse DC unbalanced magnetron sputtering is studied. Ar-N2 gas mixtures are used. Emission lines corresponding to titanium cathode and gas discharge species are considered. In this study, the two-dimensional (2-D) emission profiles of the lines are measured by an ICCD camera during TiN coatings. It turns out that the 2-D emission profiles of the various lines behave differently. As a result, we obtained the surface roughness value of RMS 2.3 nm at higher pulse frequency and 3.8 nm at lower pulse duty cycle.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 475, Issues 1â2, 22 March 2005, Pages 91-96
Journal: Thin Solid Films - Volume 475, Issues 1â2, 22 March 2005, Pages 91-96
نویسندگان
Yong M. Kim, Min J. Jung, Soo G. Oh, Jeon G. Han,