کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9813055 | 1518124 | 2005 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Structural study of a low dielectric thin film using X-ray reflectivity and grazing incidence small angle X-ray scattering
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Structural study of a low dielectric thin film using X-ray reflectivity and grazing incidence small angle X-ray scattering Structural study of a low dielectric thin film using X-ray reflectivity and grazing incidence small angle X-ray scattering](/preview/png/9813055.png)
چکیده انگلیسی
We have studied the structure of a high-porous silica thin film with pore sizes in nanometer scale using X-ray reflectivity and small angle X-ray scattering in grazing incidence geometry. The reflectivity data provide the information of surface and interface characteristics, density-depth profile, and porosity of the xerogel film. Whereas the grazing incidence small angle X-ray scattering results reveal the internal structure of the porous film, including pore shape and size, and averaged inter-pore spacing. It is demonstrated that the combination of these two techniques is a powerful structural characterization tool to porous thin films.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 472, Issues 1â2, 24 January 2005, Pages 323-327
Journal: Thin Solid Films - Volume 472, Issues 1â2, 24 January 2005, Pages 323-327
نویسندگان
C.-H. Hsu, U-Ser Jeng, Hsin-Yi Lee, Chih-Mon Huang, K.S. Liang, D. Windover, T.-M. Lu, C. Jin,