
Electrode contact study for SiGe thin film operated at high temperature
Keywords: اسپری کردن; 73.40.NS; 68.55.Jâ; 68.60.Dv; 84.37.+q; 81.15.Cd; SiGe; Sputtering; Electrode; Contact; TLM; High temperature; Specific contact resistivity; Adhesion layer;