Submicrometric gratings fabrication from photosensitive organo-silica-hafnia thin films elaborated by sol-gel processing

►Silica-hafnia matrix with high refractive index was prepared using sol-gel process. ►Organic and inorganic networks formation of thin films was investigated. ►Optical properties are influenced by annealing treatment and initial hafnium amount. ►The use of high Si:Hf molar ratio can lead to a loss transmittance below 300 nm. ►Submicrometric grating period can be prepared using a holographic method.