Characterization of zinc-tin-oxide films deposited by thermal co-evaporation

► Zinc-tin-oxide (ZTO) deposited by thermal co-evaporation are amorphous and opaque. ► Post-annealing in air leads to increased transparency but decreased conductivity. ► The lowest resistivity, ~ 8 × 10− 5 Ω cm, is obtained for ZTO with 33 at.% Sn. ► Conductive transparent ZTO films can be prepared by co-evaporation and annealing.