Evolution of silicon nanoclusters and hydrogen in SiNx:H films: Influence of high hydrostatic pressure under annealing

► We study the optical properties of SiNx:H films annealed at a high pressure. ► After annealing at 1130 °С, 5 h, the SiN1.3 film contains hydrogen. ► Films annealed under high pressure showed changes in their photoluminescence spectra.